(Nanowerk Information) PI, a worldwide chief in movement management and nanopositioning methods, affords an ultra-low-profile Z-Tip-Tilt stage designed for demanding alignment functions in optics, semiconductors, precision meeting, and photonics.
Based mostly on air bearings and linear motors, the stage is wear-free, maintenance-free, and cleanroom appropriate.
Excessive velocity is ensured by 3-phase linear motors, whereas excessive decision and precision are supplied by closed-loop operation with linear encoders (1 nm decision) for direct place suggestions. The direct-drive design, freed from drive screws and gears, permits excessive dynamics with acceleration as much as 1g, excessive velocity, and excellent positional repeatability with zero backlash. The ten-inch diameter platform helps a excessive load capability of 18 lbs. The compact design supplies 5 mm of Z-travel and a rotation vary of two° for tilt axes.
Low Profile Enabled by Parallel-Kinematics Design
The parallel-kinematics, built-in design with just one transferring platform considerably reduces peak, middle of gravity, and inertia — splendid for high-dynamic functions. The one-platform design additionally eliminates the buildup of errors generally seen in Z-Tip-Tilt methods based mostly on three particular person modules.
5-Axis and 6-Axis Combos
The A-523 Z-Tip-Tilt stage could be paired with a 2-axis planar air-bearing stage to supply 5-axis precision movement for semiconductor and laser processing automation. A 6DOF mixture with the low-profile A-361 XYθz stage can also be out there.
Instance of a 5-Axis high-precision stage based mostly on the A-523 Z-Tip-Tilt and the A-311 planar XY stage
Extra data on the Z-Tip-Tilt nanopositioning stage: A-523 PIglide Excessive-Precision Z-Tip-Tilt Stage with Air Bearings.
Purposes
The A-523 three-axis air-bearing stage is good for high-precision alignment automation duties, resembling optics testing and positioning, wafer inspection, fiber positioning, flat-screen inspection, lens alignment, maskless lithography, and µ-LED manufacturing.
