Configurable, granite-based wafer-stage sub-system, new from PI.
Picture Credit score: PI (Physik Instrumente) LP
Auburn, MA – PI, a worldwide chief in nanopositioning and movement management, is providing granite-based multi-axis precision movement methods for the automation of wafer metrology, glass substrate inspection and lithography purposes. These extremely correct levels are primarily based on modular ideas that permit quick customizations. A number of applied sciences can be found together with air bearings, rails-on-granite, and a number of other varieties of piezo drive methods. Giant journey ranges of 1 meter and extra might be achieved with a wide range of completely different configurations. The XYZ-Theta instance stage proven is designed for skinny movie metrology outfitted with direct drive motors, nanometer decision encoders, and high-performance ACS movement controllers.
Extra data on precision movement for semiconductor purposes
PI’s superior design experience and lengthy expertise as a provider to high tier semiconductor producers and main system integrators permits us to know and meet the excessive calls for of the trade, together with copy precisely and assembly strict cleanroom necessities.
Industries Served
Semiconductors, photonics, optics, automation, metrology
